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Metrology Wavefront-based alignment: properties and precision

Wavefront-based alignment is an elegant approach to high-precision positioning of functional surfaces and elements in multi-component optical systems. The system status can be evaluated in one single measuring operation and suitable correction actions can be derived in multiple degrees of freedom.

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  • Fraunhofer-Institut für Produktionstechnologie IPT

    Steinbachstraße 17
    52074 Aachen

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